You are here: Home » Industries » Semiconductors » Quality Control » Quantification of N using Nuclear Reaction Analysis

Quantification of N using Nuclear Reaction Analysis (NRA)

Quantification of N using Nuclear Reaction Analysis (NRA) The data shows the areal density of N to be 1.42e 15 (+/- 0.09) atoms/cm2

The detection limit is 3e13 atoms/cm2.