XPS Depth Profiling - Quantified Elemental Information with Depth

Quantified elemental information with depth can be determined utilising XPS (X-Ray Photoelectron Spectroscopy) depth profiling.

Standard XPS provides quantified elemental information from the outer surface. In depth profiling mode an ion beam is used to slowly etch away the surface revealing subsurface information which can then be analysed.
XPS depth profiling provides information from the outer surface to a depth of 1 micron.

Example

A commercially available DVD has been analysed by XPS depth profiling with the results shown in the figure below.

5 distinct layers can be seen on the profile.

Layer 1 0 to11.5nm
Protective layer containing Zn, S and O

Layer 2 11.5 to15.5nm
Active layer containing 2 elements

Layer 3 15.5 to24nm
A second protective layer, containing Zn, S and O

Layer 4 24 to50nm
The reflective layer of Ag

Layer 5 above 50nm
The substrate, generally polycarbonate

The major benefit of this technique is that quantified information can be gained as well as layer thicknesses.

For further information please contact us on +44 (0)1782 764428, or email: enquiries@ceram.com